Micromachined piezoelectric devices for acoustic applications

Tianling Ren,Yi Shu,Yi Yang,Changjian Zhou,Yufeng Wang,He Tian,ChangHai Zhang,Hui Sun,

Electron Devices and Solid State Circuit（2012）

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摘要

Micromachining technology has been widely used to reduce the device volume and improve the reliability. Piezoelectric devices can utilize the effects of piezoelectricity and inverse piezoelectricity to generate and detect acoustic vibration. This paper presents an overview of micromachined piezoelectric devices working in several different frequency ranges and their specific applications. The device configuration and chief fabrication process are discussed.

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关键词

micromachined devices,piezoelectricity,fbar,pmut,microphones,microphone,mems,device configuration,inverse piezoelectricity,reliability,piezoelectric devices,micromachined piezoelectric devices,ultrasonic devices,piezoelectric,micromachining technology,acoustic,microspeaker,micromachining,acoustic vibration

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