Single-Walled Carbon Nanotube Pirani Gauges Prepared by DEP Assembly

IEEE Transactions on Nanotechnology, no. 3 (2013): 323-329

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摘要

This paper reports the design, fabrication, and characteristics of the single-walled carbon nanotubes (SWNTs) Pirani gauge fabricated by dielectrophoretic assembly first which requires simple equipments and process, costs little, and operates at room temperature without limitation on the materials of electrode and substrate. Its theory an...更多

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简介
  • P IRANI gauges are widely applied in pressure monitoring in vacuum systems [1]. Traditional Pirani gauges mainly consist of a suspended Tungsten wire as a heater and a glass tube around as heat sink.
  • Minishing the gap between heater and heat sink even to nanoscale to increase the upper limit [9] and the contact area to decrease the lower limit were used to enlarge the dynamic range of a Pirani gauge
  • These methods for improving device performance are restricted by microfabrication techniques and materials compatibility, and make the process much complicated and expensive
重点内容
  • P IRANI gauges are widely applied in pressure monitoring in vacuum systems [1]
  • High sensitivity is mainly achieved by utilizing high temperature coefficient of resistance (TCR) material as heater
  • We present a single-walled carbon nanotubes (SWNTs) Pirani gauge prepared by dielectrophoretic (DEP) assembly technique first, which requires very simple equipments and process, costs little, and especially operates at room temperature without limitation on the materials of electrode and substrate
  • Its performance was characterized in detail including I–V characteristic, resistance– temperature properties, thermal response, resistance–pressure, and power consumption properties
  • I–V curve of the SWNTs Pirani gauge at atmosphere was measured by HP4156B and is shown in Fig. 7
  • We present a SWNTs Pirani gauge fabricated by DEP assembly first, which requires very simple equipments and process, costs little, and especially operates at room temperature without limitation on the materials of electrode and substrate
结果
  • The SWNTs Pirani gauge was metallic packaged using Au wire bonding.
  • Its performance was characterized in detail including I–V characteristic, resistance– temperature properties, thermal response, resistance–pressure, and power consumption properties.
  • I–V curve of the SWNTs Pirani gauge at atmosphere was measured by HP4156B and is shown in Fig. 7.
  • It reveals good linearity with the resistance of 4.42 MΩ.
  • There may have the metallic and semi-
结论
  • The authors present a SWNTs Pirani gauge fabricated by DEP assembly first, which requires very simple equipments and process, costs little, and especially operates at room temperature without limitation on the materials of electrode and substrate.
  • This SWNTs Pirani gauge comprises nine 3-μm-long SWNTs bundles as heater and Au/W as electrodes.
  • A simple and low-temperature DEP assembly technique may let it integrated with other device and structure or embedded in anywhere where gas pressure sensing is necessary
基金
  • This work was supported by the National Basic Research Program of China (973 Program) under Grant 2009CB320300
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