Transformation of vibration shapes in resonances of micromachined piezoelectric circular membrane

In this paper, we report observation and study of transformation of the vibration shapes in resonances of micromachined piezoelectric circular membrane. Micromachined piezoelectric zinc oxide circular membrane was fabricated and the vibration shapes of the membrane at different frequencies were measured by a scanning Mach-Zehnder interferometer. The finite element analysis with a commercial software ANSYS was performed to study the vibration characteristics of the circular membrane. The result shows that the transformation of the vibration shapes in resonances of the circular membrane could be influenced by its asymmetrical characteristics.