An Atomic Scale Simulation on {100} Oriented CVD Diamond Film Grown under Modified Chemical Reaction Model

Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering, Volume 31, Issue 5, 2002, Pages 352-352.

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Abstract:

In this paper, the chemical reaction model in the growth of (100) oriented CVD (chemical vapour deposition) diamond film is founded, and the growth mechanisms of surface chemisorption are related to: (1) the BCN mechanism; (2) the dimer insertion; and (3) the trough insertion, in which the trough insertion mechanism is in dominant. The gr...More

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