Atomic-scale kinetic Monte Carlo simulation of {100}-oriented diamond film growth in C-H and C-H-Cl systems by chemical vapour deposition

We simulate the {lO0}-oriented diamond film growth of chemical vapour deposition (CVD) under different models in C-H and C-H-Cl systems in an atomic scale by using the revised kinetic Monte Carlo method. The simulation results show that: (1) the CVD diamond film growth in the C-H system is suitable for high substrate temperature, and the ...More