Arrays Of Coplanar Electrode Microcavity Plasma Devices Fabricated In Aluminum Foil

Arrays of coplanar electrode microcavity plasma devices have been fabricated in aluminum foil using photo lithography, wet etching, electrochemical anodic oxidation and other processes. It has advantages of high voltage margin, simple structure, and operating stably in Ne atmosphere, which make it possible to simplify the structure of traditional PDP.