A novel inspection and annealing procedure to rejuvenate phase change memory from cycling-induced degradations for storage class memory applications

Electron Devices Meeting(2014)

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摘要
A novel Cycle Alarm Point (CAP) inspection is proposed to monitor PCM cycling degradation. The degradation appears in two stages - (1) right shift of R-I during moderate cycling degradation, and (2) left shift of R-I when cycling damage is severe. We further propose an In-Situ-Self-Anneal (ISSA) procedure, such that once a CAP signal is detected, the annealing procedure is issued to rejuvenate the cells. We demonstrate, for the first time, PCM cycling degradation can be recovered repeatedly. This opens a new window to extend PCM endurance and reliability for storage class memory (SCM) applications.
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关键词
annealing,inspection,integrated circuit reliability,phase change memories,cap inspection,cap signal,issa procedure,pcm cycling degradation,pcm endurance,r-i left shift,r-i right shift,scm reliability,cycle alarm point inspection,cycling damage,cycling-induced degradations,in-situ-self-anneal procedure,phase change memory,storage class memory reliability
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