Microwave Properties of MAPTMS Sol-Gel Films for High-Speed Electrooptic Devices

This paper measures the dielectric constant and loss tangent of methacryloyloxy-propyltrimethoxysilane (MAPTMS) sol-gel films over a wide range of microwave frequencies. Samples were prepared by spin-coating sol-gel films onto metallized borosilicate glass substrates. The dielectric properties of the sol-gel were probed up to 50 GHz with several different sets of coplanar waveguide transmission lines electroplated onto sol-gel films. The dielectric constant and loss tangent are determined to be approximately 3.1 and 3×10-3 at 35 GHz, respectively. This demonstration shows that MAPTMS sol-gel is a viable material for integration with high-speed electrical and electrooptic devices.