Measurement of electron temperature and plasma density in coplanar AC plasma display panels

Journal of Genetics and Genomics(2003)

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摘要
Summary form only given, as follows. Summary form only given. The electron temperature and plasma density in coplanar alternating-current plasma display panels (AC-PDPs) have been experimentally investigated by a micro Langmuir probe and high speed discharge images in this experiment. It is noted in this experiment that the electron temperature obtained from both the micro Langmuir probe and high speed ICCD camera decreases from 2.5 eV to 1.2 eV as the filling Ne+Xe gas pressure increases from 150 Torr to 350 Torr. It is noted that these electron temperatures are in good agreement with each other within 5 error limit. The plasma density at the lateral distance of 125 away from the center of sustaining electrode gap has been found to be saturated from 0.73/spl times/10/sup 11/ cm/sup -3/ to 7.54/spl times/10/sup 11/ cm/sup -3/ at the Ne+Xe filling pressures ranged from 150 Torr to 350 Torr.
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关键词
langmuir probes,plasma density,plasma displays,plasma temperature,1.2 ev,150 to 350 torr,langmuir probe,ne-xe,coplanar ac plasma display panels,electron temperature
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