Si Nanocrystal Split Gate Technology Optimization for High Performance and Reliable Embedded Microcontroller Applications

Sungtaeg Kang,Jane A Yater,C Hong,J Shen,Nicole Ellis,M Herrick, H Gasquet,W Malloch,Gowrishankar L Chindalore

Opio（2008）

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摘要

In this paper, the authors present the performance characteristics of such a silicon nanocrystal split gate bitcell and report an optimal bitcell process and integration scheme for memory arrays.

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关键词

elemental semiconductors,embedded systems,microcontrollers,nanostructured materials,semiconductor storage,silicon,si,si nanocrystal split gate technology optimization,embedded microcontroller,memory arrays,optimal bitcell process,silicon nanocrystal split gate bitcell,dielectrics,oxidation,nanocrystals,fabrication,nonvolatile memory,cmos technology

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