Electron beam induced temperature oscillation for qualitative thermal conductivity analysis by an SThM/ESEM-hybrid-system
Montreal, QC（2009）
摘要
A hybrid-system consisting of a scanning thermal microscope and an environmental scanning electron microscope is used to analyze directional thermal conductivity mechanisms. An electron beam stimulates locally variable hot spots, whereas a thermal probe is used as a locally resolving detector. The detected temperature oscillation strongly depends both on the local thermal conductivity and on the directivity of the heat transport within the investigated sample. This may allow analysis of linear structures like interfaces within materials.
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关键词
electron beam effects,environmental testing,scanning electron microscopy,semiconductor device testing,temperature distribution,thermal conductivity,sthm/esem-hybrid-system,environmental scanning electron microscope,heat transport,scanning thermal microscope,temperature oscillation,thermal conductivity analysis,sthm,hybrid-system,near-field,hybrid system,electron beam,hot spot,thermal engineering,near field,conductivity,temperature measurement,heating,silicon,failure analysis,oscillations,spatial resolution,detectors
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