Integrated cryogenic current comparator based on superconductor LSI technology

Chiharu Urano,M Maruyama,Takayuki Oe,Masaaki Maezawa,T Yamada,Mutsuo Hidaka,T Satoh,S Nagasawa,Kenji Hinode,Shogo Kiryu,Naoto Kaneko

Precision Electromagnetic Measurements（2010）

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摘要

A new implementation of Sullivan-Dziuba type cryogenic current comparators (CCCs) is proposed. We designed an integrated CCC device consisting of a thin-film CCC, a pick-up coil and a SQUID sensor on a single chip. Prototype devices were fabricated by using a superconductor multilayer integrated circuit technology with chemical-mechanical polishing processes.

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关键词

chemical mechanical polishing,cryogenic electronics,current comparators,integrated circuit design,large scale integration,superconducting integrated circuits,squid sensor,sullivan-dziuba type cryogenic current comparators,chemical-mechanical polishing process,integrated ccc device,integrated cryogenic current comparator,pick-up coil,superconductor lsi technology,superconductor multilayer integrated circuit technology,thin-film ccc,windings,thin film,chip,fabrication,niobium,superconductors,cryogenics,integrated circuit

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