Integration of millisecond and spike anneals for dopant activation optimization

Shiyu Sun,Shantanu Sharma,K V Rao, Bryan Ng, D Kouzminov,Benjamin Colombeau,Naushad Variam,Shankar Muthukrishnan,Abhilash J Mayur, A Brand

Junction Technology（2013）

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摘要

The effects of anneal sequences (ms anneal followed by spike anneal vs. spike anneal followed by ms anneal) were explored. Substantial anneal sequence effects on dopant activation were also reported.

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关键词

annealing,doping profiles,optimisation,secondary ion mass spectra,sims,dopant activation optimization,millisecond anneal,spike anneal,substantial anneal sequence effects,silicon,temperature measurement

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