Modeling and fabrication of low cost MEMS varactor for filter applications

Pavan, F.R.M.,Rehder, G.P.,Carreno, M.N.P.

Microelectronics Technology and Devices（2013）

引用 0|浏览5

暂无评分

摘要

A low cost concept of a RF MEMS varactor for integration in a selectable-band patch filter is proposed, modeled and fabricated, with initially good results. A lumped element model is used to allow the simulation of the eletromechanical behavior of the MEMS varactor with the RF response of the patch filter. The first fabrication results show promising possibilities for the integration of the MEMS varactor (fabricated with microelectronics processing) and the patch filter (fabricated with printed circuit board technology) using a flip-chip process.

查看译文

关键词

flip-chip devices,micromechanical devices,printed circuits,radiofrequency filters,varactors,rf mems varactor,rf response,eletromechanical behavior,flip-chip process,lumped element model,microelectronics processing,printed circuit board technology,selectable-band patch filter,flip-chip integration,tunable patch filter

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要