Sensitivity analysis and optimization of a standing wave ultrasonic linear motor
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control(2006)
摘要
This paper presents the sensitivity analysis of an ultrasonic linear motor using design of experiments (DOE) and the finite element (FE) optimization of its deformation amplitude. A first ultrasonic linear motor prototype has been built at the laboratory. A deformation amplitude of about 6.6 ?m can be obtained by applying a 100 V voltage. The goal is to obtain a bigger deformation amplitude by var...
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关键词
Stators,Analytical models,Acoustics,Sensitivity analysis,Numerical models,Optimization,Piezoelectric materials
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