On-demand patterning of nanostructured pentacene transistors by scanning thermal lithography.

ADVANCED MATERIALS(2013)

引用 14|浏览5
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摘要
Thermal scanning lithography is used to pattern semiconducting nanoribbon-like pentacene structures with ultrahigh spatial resolution onto arbitrary substrates in air. The method allows control of the pentacene crystal growth direction and domain-size distribution. By combining these quasi-one-dimensional nanoribbon-like structures with conductive electrodes and a suitable gate dielectric, functional p-channel transistors are demonstrated.
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关键词
organic semiconductors,pentacene transistors,nanolithography,scanning thermal lithography,thermochemical lithography
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