Self-Sustaining Vibration Sensors Using Multiple Cantilever-Type Piezoelectric Bimorphs with Different Resonant Frequencies

SUMMARYIn order to realize a vibration sensor, which can operate without power supply, an optimization of the sensor configuration was studied using commercial piezoelectric bimorphs. The dependences of the energy conversion efficiency on the weight of metal mass attached to the tip of the piezoelectric bimorph and peripheral circuit components were investigated. Vibration sensors using several piezoelectric bimorphs with different weights were designed, fabricated, and tested.