Unusual behavior of a MEMS resonator in superfluid 4He

Novel mechanical resonators based on micro-electro-mechanical systems (MEMS) technology were developed for the study of superfluid 4He. The MEMS device is composed of two parallel plates, the movable plate suspended by four serpentine springs above the substrate, forming a shear mechanical oscillator. A specific device with a 1.25 μm gap was tested in the superfluid phase of 4He. At temperatures below 400 mK the device exhibits nonlinear and hysteretic behavior when the excitation exceeds a threshold. The anomalies are reminiscent of quantum turbulence and vorticity effects observed in other mechanical oscillators such as tuning forks or vibrating grids.