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Optical Properties and Structural Analysis of SiO 2 Thick Films Deposited by Plasma Enhanced Chemical Vapor Deposition

sungmin cho

yongtak kim

yonggon seo

[0]

youngmin im

daeho yoon

Journal of The Korean Ceramic Society, 2002.

Cited by: 2|Bibtex|Views0|DOI:https://doi.org/10.4191/KCERS.2002.39.5.479

Other Links: academic.microsoft.com

Keywords:

pecvdplcoptical waveguide

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