Platinum Silicide Contact To Arsenic-Doped Polycrystalline Silicon

H C W Huang,R E Cook,David Campbell,P Ronsheim,Werner A Rausch,B B Cunningham

JOURNAL OF APPLIED PHYSICS（1988）

引用 6|浏览6

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ohmic contact,transmission electron microscopy,cross section,contact resistance,single crystal,arsenic,electric conductivity,hall effect,microstructures

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