Comparison of surface vacuum ultraviolet emissions with resonance level number densities. I. Argon plasmas
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A(2014)
摘要
Vacuum ultraviolet (VUV) photons emitted from excited atomic states are ubiquitous in material processing plasmas. The highly energetic photons can induce surface damage by driving surface reactions, disordering surface regions, and affecting bonds in the bulk material. In argon plasmas, the VUV emissions are due to the decay of the 1s(4) and 1s(2) principal resonance levels with emission wavelengths of 104.8 and 106.7 nm, respectively. The authors have measured the number densities of atoms in the two resonance levels using both white light optical absorption spectroscopy and radiation-trapping induced changes in the 3p(5)4p -> 3p(5)4s branching fractions measured via visible/near-infrared optical emission spectroscopy in an argon inductively coupled plasma as a function of both pressure and power. An emission model that takes into account radiation trapping was used to calculate the VUV emission rate. The model results were compared to experimental measurements made with a National Institute of Standards and Technology-calibrated VUV photodiode. The photodiode and model results are in generally good accord and reveal a strong dependence on the neutral gas temperature. (C) 2014 American Vacuum Society.
更多查看译文
关键词
plasma,photons,surfaces,emission spectroscopy,resonance,argon,absorption spectroscopy,density
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络