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Formation mechanism of threading-dislocation array in AlN layers grown on 6H-SiC (0001) substrates with 3-bilayer-high surface steps

hironori okumura
hironori okumura
[0]
tsunenobu kimoto
tsunenobu kimoto
[0]
jun suda
jun suda
[0]

Applied Physics Letters, 2014.

Cited by: 4|Bibtex|Views1|DOI:https://doi.org/10.1063/1.4892807
Other Links: academic.microsoft.com

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