Crystallization behaviors of TiO 2 films derived from thermal oxidation of evaporated and sputtered titanium films

JOURNAL OF ALLOYS AND COMPOUNDS, pp. 938-941, 2009.

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Abstract:

TiO2 films were formed by thermal oxidation of electron-beam-evaporated and magnetron-sputtered titanium (Ti) films. it was found that the TiO2 films formed by thermal oxidation of evaporated Ti films at 450 degrees C were of rutile phase, while those derived from thermal oxidation of sputtered Ti films at 450-600 degrees C kept to be of ...More

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