Flexible organic–inorganic hybrid layer encapsulation for organic opto-electronic devices

Subimal Majee,M F Cerqueira,Denis Tondelier,Bernard Geffroy,Yvan Bonnassieux,P Alpuim,J E Bouree

Progress in Organic Coatings（2015）

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摘要

•SiNx:H films are grown using HW-CVD to be used as permeation barrier layer.•Organic PMMA layer is deposited between SiNx:H films to reduce permeation.•Good co-relation between surface roughness and barrier properties is shown.•Lowest WVTR value of ∼4.5×10−5g/m2day is reported.•Excellent flexibility of the barrier structures is shown.

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关键词

Permeation barrier,Silicon nitride,HW-CVD,PMMA,Organic electronics

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