Manipulation of the bombarding ion energy distribution in fluorocarbon plasma etchingA. Wendt, Frank Buzzi,Yuk-Hong TingBulletin of the American Physical Society(2008)引用 23|浏览13暂无评分关键词plasma etchingAI 理解论文溯源树样例生成溯源树,研究论文发展脉络