Multilevel Interconnect Networks For The End Of The Roadmap: Conventional Cu/Low-K And Emerging Carbon Based Interconnects

2011 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE AND MATERIALS FOR ADVANCED METALLIZATION (IITC/MAM)(2011)

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摘要
The impact of size effects such as surface and grain boundary scatterings and line edge roughness (LER) on the design of a multi-level interconnection network, and potential power saving offered by individual single-wall nanotube (SWNT) and mono-layer graphene interconnects are investigated and quantified for high-performance and low-cost designs implemented at future technology nodes. It is shown that size effects increase the number of metal levels for a high performance chip by as large as 22.81% and 41.35% at the 21nm and 7.5nm technology nodes, respectively. It has also been demonstrated that individual metallic SWNT and mono-layer graphene interconnects may be used to reduce the interconnect power dissipation in both high-performance and low-cost designs at the end of the roadmap. This is in contrast to previous publications which all indicated that bundles of densely packed SWNTs are needed for interconnect applications.
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关键词
resistance,power dissipation,capacitance,chip,graphene,copper,grain boundary,cu
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