A comparative study of channel formation in polymer materials using VUV and UV nano-second laser sources for use in micro-fluidic applications

UV and VUV laser ablation of micro-fluidic circuits for micro-total analysis systems (mu TAS) is an alternative to more expensive techniques of LIGA or micro-moulding. The machining of trenches in PS, PC. PMMA (CQ grade and non-CQ grade) was investigated using two Q-switched solid state lasers.. one operating at 266nm (fourth harmonic) and another at 355nm (third harmonic). These results were compared with results achieved using a 193nm Excimer laser. The structuring of the channels depends on both the laser wavelength and the target material. A comparison of the process will be presented with respect to the structure quality and efficiency of the process. Keywords: Laser ablation.. polymer materials, micro-fluidics.