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Aromatizing unzipping polyester for EUV photoresist

ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXII, (2015)

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Abstract

New "self-immolating" or "unzipping" polymers, materials that depolymerize in response to irradiation, were designed and prepared successfully. We studied several candidate polymers and ultimately chose two of them for further development. One is a polyester that aromatizes upon depolymerization. The unzipping reaction initiated by UV exp...More

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kensuke matsuzawa
kensuke matsuzawa
michael g olah
michael g olah
wade wang
wade wang
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