Ammonothermal Growth Of Polar And Non-Polar Bulk Gan Crystal

Yutaka Mikawa, Takayuki Ishinabe,Shinichiro Kawabata,Tae Mochizuki, Atsuhiko Kojima,Yuji Kagamitani, Hideo Fujisawa

GALLIUM NITRIDE MATERIALS AND DEVICES X(2015)

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摘要
SCAAT (TM) has been developed as a novel ammonothermal method which enables to obtain strain free, high quality and large size bulk gallium nitride (GaN) crystals under high pressure and high temperature super-critical ammonia. One of the unique features of this technique is relatively high growth rate of more than a few hundred micrometers per day toward polar and non-polar axis with excellent crystalline quality. The morphology, X-ray rocking curve, etch pit density and electric properties are presented.
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关键词
acidic ammonothermal, bulk GaN growth, supercritical ammonia, SCAAT, non-polar
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