Low-loss high-speed silicon Mach-Zehnder modulator for optical-fiber telecommunications
Proceedings of SPIE(2013)
摘要
Low-loss high-speed traveling-wave silicon Mach-Zehnder modulator with reduced series resistance is studied in microwave and optical measurements. Microwave impedance and propagation loss under reverse bias are characterized by S-parameter measurements. Resonant loss due to series inductance-resistance-capacitance coupling limits microwave performances of the traveling-wave modulator. High-speed optical performances are characterized, based on eye-diagram measurements in on-off keying at 10-32 Gb/s and constellation and eye-diagram measurements in differential phase-shift keying at 20 Gb/s. Dispersion tolerance in error-free transmission in 10-Gb/s on-off keying and 20-Gb/s differential phase-shift keying is obtained as +/-950 ps/nm and +/-220 ps/nm, respectively by path-penalty measurements. Transmission performance in 10-Gbps on-off keying is comparable with lithium niobate Mach-Zehnder modulator.
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关键词
Silicon photonics,Optical modulator,Integrated photonic devices,Optical fiber communication
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