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A vertical driven inertial micro-switch with dual spring to prolong holding time

W. Chen,Z. Yang,Y. Wang,G. Ding,H. Wang, X. Zhao

2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)(2015)

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Abstract
In this paper, a new model has been proposed for the design of inertial micro-switch. Compared with the traditional model consisted by movable-fixed electrode, the electrodes are designed as two movable springs. The dynamic response processes of electrodes can be controlled via the structure parameters. The simulation results indicated that the elastic contact can effectively prolong the holding time. The fabricated prototypes were tested by drop hammer system. The test results demonstrated that the holding time of improved inertial micro-switch much longer than the traditional designed one with the same threshold acceleration.
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Key words
MEMS, inertial micro-switch, holding time, dual spring, dynamic response
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