Comparative Study Of Algan/Gan Hemts On Free-Standing Diamond And Silicon Substrates For Thermal Effects
2010 IEEE COMPOUND SEMICONDUCTOR INTEGRATED CIRCUIT SYMPOSIUM (CSICS)(2010)
摘要
In this work, we compare for the first time the performance results of AlGaN/GaN HEMTs processed on a freestanding chemical vapor deposition (CVD) polycrystalline diamond substrate and a silicon substrate with nominally the same epitaxial AlGaN/GaN layers both grown by metal-organic chemical vapor deposition (MOCVD). The objective of this work is to compare the small signal and DC trends of the transistors fabricated on the different substrates as a function of temperature. Wafer scale results were obtained from both wafers for 2 x 150 mu m devices with gate lengths of 0.18 mu m and 0.20 mu m for the silicon and CVD diamond wafers respectively.
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关键词
HEMT,AlGaN,CVD Diamond,thermal
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