Electrical Interconnect And Microfluidic Cooling Within 3d Ics And Silicon Interposer
PROCEEDINGS OF THE ASME 12TH INTERNATIONAL CONFERENCE ON NANOCHANNELS, MICROCHANNELS, AND MINICHANNELS, 2014(2014)
摘要
Heat dissipation is a significant challenge for three-dimensional integrated circuits (3D IC) due to the lack of heat removal paths and increased power density. In this paper, a 3D IC system with an embedded microfluidic cooling heat sink (MFHS) is presented. In the proposed 3D IC system, high power tiers contain embedded MFHS and high-aspect ratio (23:1) through-silicon-vias (TSVs) routed through the integrated MFHS. In addition, each tier has dedicated solder-based microfluidic chip I/Os. Microfluidic cooling experiments of staggered micropin-fms with embedded TSVs are presented for the first time. Moreover, the lateral thermal gradient across a chip is analyzed with segmented heaters.
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