Influence of consumed power on structural and nano-mechanical properties of nano-structured diamond-like carbon thin films

Hitendra K Malik,Ishpal Rawal,Sushil Kumar,Neeraj Dwivedi

Applied Surface Science（2014）

引用 21|浏览2

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摘要

•PECVD deposition of DLC films.•Plasma characterization by VI probe.•Structural and nano-mechanical properties.•High hardness is observed in DLC films.

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关键词

Plasma deposition,VI probe,XPS,Nanoindentation,DLC

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