Dielectric breakdown during Cs + sputtering of polyvinyl chloride

F Wahoud,Jerome Guillot,J N Audinot,Patrick Bertrand,Arnaud Delcorte,H N Migeon

Applied Surface Science（2014）

引用 4|浏览11

暂无评分

摘要

•Charge accumulation causes a dielectric breakdown of sputtered organic film.•The breakdown neutralizes the charge.•The modified chemistry is unrevealed by XPS.

查看译文

关键词

Polyvinl chloride,SIMS,XPS,Charge effect,Dielectric breakdown

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要