Inline RF sputtered TAZO films for applications in hydrogenated amorphous silicon thin film solar cells

Applied Surface Science(2014)

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Abstract
•Feasibility of TAZO front contact for a-Si:H solar cells is studied, and the cells show high stability and performances.•HCl-etched TAZO can have a highly textured morphology with a low aspect ratio.•TAZO films can have higher haze and lower resistance compared to Asahi substrates.•Etching process reproducibility can be increased by multi-stepped etching.•The impurity diffusion at TAZO/p-layer can be avoided by inserting a diffusion barrier layer.
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Key words
Hydrogenated amorphous silicon,Thin film solar cell,In-line sputtered,TAZO
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