Analysis of the modified williamson-hall plot of non-polar a-plane GaN films

Journal of the Korean Physical Society, Volume 62, Issue 4, 2013, Pages 601-605.

Cited by: 1|Bibtex|Views1|DOI:https://doi.org/10.3938/jkps.62.601
Other Links: academic.microsoft.com|link.springer.com

Abstract:

We report on the Williamson-Hall (W-H) plot analysis of non-polar a-plane GaN (a-GaN) films for a better understanding of the anisotropic peak broadening with X-ray in-beam direction. The full width at half maximum (FWHM) values of the symmetric reflections of the X-ray rocking curves at different angles phi for the a-GaN film clearly sho...More

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