Nano-Scale Ablation With Soft X-Ray Lasers

Fernando Brizuela,Herman Bravo,Georgiy Vaschenko,Mark Berrill,Benjamin Langdon,Carmen S. Menoni,Oscar Hemberg,Scott Bloom,Weilun Chao,Erik H. Anderson,David T. Attwood,Jorge J. Rocca

PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)（2007）

引用 1|浏览25

暂无评分

摘要

We have demonstrated ablation of holes with diameter as small as 82 nm in polymethyl methacrylate (PMMA) by focusing the output of a capillary discharge soft x-ay laser with a Fresnel zone plate. We also report the first demonstration of laser induced breakdown spectroscopy with soft x-ray laser light.

查看译文

关键词

ablation, soft x-ray laser, spectroscopy

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要