Material micromachining using bursts of high repetition rate picosecond pulses from a fiber laser source

In this paper, we demonstrate the benefits of using bursts of picosecond pulses for material micromachining and compare the results with those obtained when using a nanosecond source with similar pulse energy, pulse width and pulse shape. The picosecond laser source used for the experiments was delivering 60-ps pulses at a repetition rate of 1.8 GHz, grouped within arbitrarily-shaped bursts having a width that could be varied from 2.5 to 40 ns. The laser output central wavelength was at 1064 nm and the output beam M-2 value was below 1.15. Micro-milling experiments were performed on silicon for two levels of energy per burst and with different burst amplitude profiles. We show that the maximum material removal efficiency and the surface quality can be increased by more than 25% when using bursts of picosecond pulses with respect to nanosecond pulses with similar energy per pulse. Effect of shaping the burst envelope of the picosecond laser on the maximum material removal efficiency is also presented.