A vacuum pump coaxial probe system for measurement of dielectric properties of materials with smooth surfaces
MEASUREMENT SCIENCE AND TECHNOLOGY(1995)
摘要
A technique for measuring dielectric properties of materials using a coaxial probe is presented. It aims to overcome the error due to air gap between the probe and the sample. By pumping out air between the probe and the sample, a more accurate measurement result can be obtained. The technique is experimentally verified by measuring the dielectric properties of ct-Si crystals and is shown to be accurate, convenient, non-destructive and non-contaminating.
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关键词
dielectric properties
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