Optical Microscanner Using a Pair of Thermal Microactuators with Alternating Drive

Prototypes of optical microscanners using a pair of thermal microactuators have been designed, fabricated and evaluated. A micromirror with an area of 200×200µm is suspended by a pair of serpentine beams which are connected to a pair of thermal microactuators. The tilted angle of the mirror was simulated using FEM simulator Intelli Suite to optimize the beam parameters. The measured scan angle was about ±1.8°, which agreed reasonably well with the simulated results.