Effects of temperature on ZnO hybrids grown by metal-organic chemical vapor deposition

The growth of three-dimensional ZnO hybrid structures by metal-organic chemical vapor deposition was controlled through their growth pressure and temperature. Vertically aligned ZnO nanorods were grown on c-plane of sapphire substrate at 600°C and 400Torr. ZnO film was then formed in situ on the ZnO nanorods at 100, 600, and 700°C and 10Torr. High-resolution X-ray diffraction measurements showed that the ZnO film on the nanorods/sapphire grew epitaxially, and that the ZnO film/nanorods hybrid structures had well-ordered wurtzite structures. The hybrid ZnO structure was shown to be about 3–5μm by field-emission scanning electron microscopy. The hybrid formed at 600°C showed better crystalline quality those formed at 100°C or 700°C. These structures have potential applicability as nanobuilding blocks in nanodevices.