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Estimation of the Reconstruction Parameters for Atom Probe Tomography

MICROSCOPY AND MICROANALYSIS, no. 4.0 (2015): 296-305

Cited: 130|Views25

Abstract

The application of wide field-of-view detection systems to atom probe experiments emphasizes the importance of careful parameter selection in the tomographic reconstruction of the analyzed volume, as the sensitivity to errors rises steeply with increases in analysis dimensions. In this article, a self-consistent method is presented for th...More

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