High-Electron-Mobility Transistors Based on InAlN/GaN Nanoribbons

IEEE Electron Device Letters(2011)

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摘要
We demonstrate high-electron-mobility transistors (HEMTs) based on InAlN/GaN nanoribbon (NR) structures. These devices, with NR widths d in the 50-90 nm range, are fabricated through a top-down technology on planar InAlN/GaN samples grown on a SiC substrate. The electrical properties of the InAlN/GaN NRs have been characterized by transmission-line model measurements and in HEMT structures, and co...
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关键词
Gallium nitride,HEMTs,MODFETs,Aluminum oxide,Performance evaluation,Logic gates
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