Ion energy distributions measured inside a high-voltage cathode in a BF3 pulsed dc plasma used for plasma doping: experiments and ab initio calculations

The purpose of this paper is the characterization of a plasma-doping system in BF3. Energy distributions (IEDs) of boron ions crossing a high-voltage sheath (up to 1 kV) are measured in a BF3 plasma under different experimental conditions. It is demonstrated that relative percentages of boron ions reaching the cathode and IED shapes are g...More