Ion energy distributions measured inside a high-voltage cathode in a BF3 pulsed dc plasma used for plasma doping: experiments and ab initio calculations

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2012.

Cited by: 1|Views10

Abstract:

The purpose of this paper is the characterization of a plasma-doping system in BF3. Energy distributions (IEDs) of boron ions crossing a high-voltage sheath (up to 1 kV) are measured in a BF3 plasma under different experimental conditions. It is demonstrated that relative percentages of boron ions reaching the cathode and IED shapes are g...More

Code:

Data:

Get fulltext within 24h
Bibtex
Upload PDF

1.Your uploaded documents will be check within 24h, and coins will be credited to your account.

2.As the current system does not support cash withdrawal, you can add staff WeChat (AMxiaomai) to receive it as a red packet.

3.10 coins will be exchanged for 1 yuan.

?

Upload a single paper

for 5 coins

Wechat's Red Packet
?

Upload 50 articles

for 280 coins

Wechat's Red Packet
?

Upload 200 articles

for 1200 coins

Wechat's Red Packet
?

Upload 500 articles

for 3000 coins

Wechat's Red Packet
?

Upload 1000 articles

for 7000 coins

Wechat's Red Packet
Your rating :
0

 

Tags
Comments