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Effect of substrate temperature on residual stress of ZnO thin films prepared by ion beam deposition

Electronic Materials Letters, no. 1 (2012): 27-32

Cited by: 25|Views3
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Abstract

We have investigated the effect of substrate temperature on micro-structural properties of ZnO thin films prepared by ion beam deposition technique. ZnO thin films were deposited on AlN-buffered Si (111) and sapphire (001) substrates at various substrate temperatures. The structural properties and surface morphologies were examined by hig...More

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jessica lynn hoffman
jessica lynn hoffman
nam soo kim
nam soo kim
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