Effect of substrate temperature on residual stress of ZnO thin films prepared by ion beam deposition
Electronic Materials Letters, Volume 8, Issue 1, 2012, Pages 27-32.
ZnO thin film ion beam deposition stress substrate temperature
We have investigated the effect of substrate temperature on micro-structural properties of ZnO thin films prepared by ion beam deposition technique. ZnO thin films were deposited on AlN-buffered Si (111) and sapphire (001) substrates at various substrate temperatures. The structural properties and surface morphologies were examined by hig...More
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