Effect of exothermic reactions on the mobility of Ar+ in CF4

In this letter we present a cross-section set and transport properties for Ar+ scattering on CF4 for relative energies up to 1000 eV. Monte Carlo simulation method is applied to accurately calculate transport parameters in hydrodynamic regime. We present new data for Ar+ ions in CF4 as a function of reduced electric fields E/N (N-gas density) where the gas temperature T-g is used as a parameter. Values of the reduced mobility are discussed. Discrepancy of reduced mobility for Tg -> 0 and E -> 0 from the polarization limit was previously theoretically considered but rarely measured especially in the presence of exothermic reactions. We find that internally resonant exothermic dissociative charge transfer cross-section for CF3+ production significantly increases zero-field ion mobility with respect to the polarization limit. Copyright (C) EPLA, 2015