Synthesis of LaAlO3by Metal Organic Decomposition on SrTiO3substrates

LaAlO3 (LAO) films on SrTiO3 (STO) substrates have been produced by metal organic decomposition using La(C5H7O2)(3) and Al(C5H7O2)(3) as precursors dissolved in propionic acid. The process consists of growing thin layers through dip coating and subsequent annealing. After testing different cationic ratios of La and Al, it was determined that an optimal ratio leads to a single LAO phase film that grows epitaxially (cube on cube) on top of the STO. This was shown by X-ray diffraction (XRD) and transmission electron microscopy (TEM) analyses. These analyses, as well as additional X-ray reflectivity analysis, also revealed that the LAO's thickness obtained in one dip ranges from 8nm to 16nm. Taking advantage of the epitaxial conditions, several layers can be stacked by successive dip coatings and annealing to form an epitaxial structure.