Simple and fast fabrication of a-Si:H/c-Si hetero-junction solar cells by dual-chamber hot wire chemical vapor deposition

Renewable Energy, pp. 397-402, 2014.

Cited by: 3|Views0


One of the fabrication issues in hetero-junction crystalline Si solar cells is the overhead time between the deposition steps of the top and bottom surfaces, because flipping of the progressing wafer is necessary to process the both sides of the wafer. To reduce the overall processing time by reducing the overhead time, we propose a dual-...More



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