Improvement of Cut Quality in Rapid-Cutting of Glass Method via Femtosecond Laser Filamentation
JOURNAL OF LASER MICRO NANOENGINEERING(2015)
摘要
Microfabrication of transparent materials using femtosecond laser pulses has showed good potential towards industrial application. Maintaining pulse energies above the critical self-focusing limit produced filaments that were used for micromachining purposes. This article demonstrates a fabrication technique using femtosecond filaments generated in water which is in contact with the transparent sample, in addition, given a slight modification to this setup, the quality of the micro processed samples can be increased dramatically. These fabricated holes have a tapper angle close to zero; moreover, the fabrication time is of the order of tens of seconds.
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关键词
Femtosecond pulse micromachining,filament processing,ablation,glass cutting
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