Improvement of Cut Quality in Rapid-Cutting of Glass Method via Femtosecond Laser Filamentation

JOURNAL OF LASER MICRO NANOENGINEERING(2015)

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摘要
Microfabrication of transparent materials using femtosecond laser pulses has showed good potential towards industrial application. Maintaining pulse energies above the critical self-focusing limit produced filaments that were used for micromachining purposes. This article demonstrates a fabrication technique using femtosecond filaments generated in water which is in contact with the transparent sample, in addition, given a slight modification to this setup, the quality of the micro processed samples can be increased dramatically. These fabricated holes have a tapper angle close to zero; moreover, the fabrication time is of the order of tens of seconds.
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关键词
Femtosecond pulse micromachining,filament processing,ablation,glass cutting
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